Home  Catalogue of authors Catalogue of works Full search Add papers Login

The Capacitance Sensors Application for Sapphire Wafer Flatness Measurement
Authors
 Skidanov V.A.
Date of publication
 2006
Type of work
 текст доклада на конференции
Library reference
 Skidanov V.A. The Capacitance Sensors Application for Sapphire Wafer Flatness Measurement. Digest of the XX Conference "Eurosensors-2006" Proceedings / Gothenborg, Sweden, 17-20 Sept. 2006 – p.p. 394-395
To IPPM site    To InfoMES site    Feedback
Copyright © 2012-2024 IPPM RAS. All Rights Reserved.
Updated and substantially revised version of system of 2016.
Design of site: IPPM RAS