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Fe Ions Diffusion and Oxygen Complexes Evolution during Thermodonors Annealing in B-Doped Czochralsky Silicon Crystal
Authors
 Skidanov V.A.
Date of publication
 2010
Type of work
 текст доклада на конференции
Library reference
 Skidanov V.A. Fe Ions Diffusion and Oxygen Complexes Evolution during Thermodonors Annealing in B-Doped Czochralsky Silicon Crystal. Defect and Diffusion Forum, Vols. 297-301 (2010). pp 495-501. doi:10.4028/www.scientific.net/DDF.297-301.495. 2010.
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