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Reversible Gettering of Fe Ions by Nanosized Oxygen Precipitates in Oxidized P-type Czochralski Silicon Crystal

Authors
 Skidanov V.A.
Date of publication
 2011
Type of work
 текст доклада на конференции

Library reference
 Skidanov V.A. Reversible Gettering of Fe Ions by Nanosized Oxygen Precipitates in Oxidized P-type Czochralski Silicon Crystal. Proceedings of 7th International Conference on Diffusion in Solids and Liquids. Algarve, Portugal. June 25-30, 2011. (to be published).

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