Reversible Gettering of Fe Ions by Nanosized Oxygen Precipitates in Oxidized P-type Czochralski Silicon Crystal |
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Authors |
| Skidanov V.A. |
Date of publication |
| 2011 |
Type of work |
| текст доклада на конференции |
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Library reference |
| Skidanov V.A. Reversible Gettering of Fe Ions by Nanosized Oxygen Precipitates in Oxidized P-type Czochralski Silicon Crystal. Proceedings of 7th International Conference on Diffusion in Solids and Liquids. Algarve, Portugal. June 25-30, 2011. (to be published). |
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